I use Joomla! 1.5.9 and artio joomsef 3.2.9.

artio joomsef cache option is active. components/com_sef/cache folder and cache.php file are 777 but cache urls don't write in cache.php I deleted cache.php, but it didn't create this file again. It works on mod_rewrite mode. I tried both Joomla! cache system on and off. My server is Linux, safe mode is off. Please help me. :(

Hello,

are you sure the JoomSEF is active and creating new URLs at all?
If yes, I would try reinstalling JoomSEF.

Yes of course, it is active and creates new URLs. I reinstalled it but nothing changed. :(